|
|
|
|
| LEADER |
00000naa2a2200000 4500 |
| 001 |
235325 |
| 005 |
20231031204201.0 |
| 035 |
|
|
|a (RuTPU)RU\TPU\book\256461
|
| 035 |
|
|
|a RU\TPU\book\256459
|
| 090 |
|
|
|a 235325
|
| 100 |
|
|
|a 20130409d2001 k y0engy50 ba
|
| 101 |
0 |
|
|a eng
|
| 102 |
|
|
|a RU
|
| 200 |
1 |
|
|a Vacuum arc ion and plasma source Raduga-5. Technological applications
|f A. I. Ryabchikov [et al.]
|
| 320 |
|
|
|a References: p. 383 (5 tit.)
|
| 330 |
|
|
|a The paper discusses examples of realizing the regimes of high-intensity and high-concentration ion implantation, and plasma deposition of coatings including the conditions of dynamic ion mixing using "Raduga-5", a source of accelerated ions and plasma based on the DC vacuum arc discharge. It is shown that when a target is treated with high average power beams, it is possible to dope a material at depths exceeding the projective ion range by an order of magnitude. Features of ion beam application at different stages of ion plasma deposition of coatings are considered. Examples are given for the formation of wide transition layers between the coating and the substrate under conditions of intensive ion mixing. Mechanisms of change in the properties of the coatings formed with decreasing microparticle fractions in the arc plasma stream are considered
|
| 461 |
|
1 |
|0 (RuTPU)RU\TPU\book\39044
|t Korus 2001
|o The 5th Korea-Russia International Symposium on Science and Technology, June 26 - July 3, 2001, Tomsk
|o proceedings
|f Tomsk Polytechnic University (TPU) ; KORUS
|d 2001-
|
| 463 |
|
1 |
|0 (RuTPU)RU\TPU\book\31152
|t Vol. 1
|v P. 380-383
|d 2001
|p 392 p.
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 701 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Stepanov
|b I. B.
|c physicist
|c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences
|f 1968-
|g Igor Borisovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\34218
|
| 701 |
|
1 |
|a Dektyarev
|b S. V.
|c physicist
|c design engineer of Tomsk Polytechnic University
|f 1957-
|g Sergey Valentinovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\35672
|
| 701 |
|
1 |
|a Shulepov
|b I. A.
|c physicist
|c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1954-
|g Ivan Anisimovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\33092
|
| 701 |
|
1 |
|a Lukonin
|b E. I.
|c physicist
|c Leading engineer of Tomsk Polytechnic University
|f 1947-
|g Evgeny Ivanovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\32793
|
| 701 |
|
1 |
|a Sivin
|b D. O.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Denis Olegovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\34240
|
| 801 |
|
1 |
|a RU
|b 63413507
|c 20130408
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20160630
|g RCR
|
| 942 |
|
|
|c BK
|
