Phenomenological Model of Dc Magnetron Discharge; 7 International conference on modification of materials with particle beams and plasma flows
| Parent link: | 7 International conference on modification of materials with particle beams and plasma flows.— 2004.— [P. 332-335] |
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| Muut tekijät: | , , , |
| Yhteenveto: | Title from the title-page. A phenomenological model of DC magnetron discharge has been created on basis of probe measurements of cathode-fall potential. Ionization rate of operating gas, plasma density depending on discharge current, coordinate distribution of ion and electron discharge current, energy distribution of accelerated argon ions on target surface had been calculated. It is shown that cathode-fall potential is characteristic of DC magnetron sputtering system and main processes caused material sputtering take place within a area several millimeters thickness near the target surface. Режим доступа: из корпоративной сети ТПУ Text files |
| Kieli: | englanti |
| Julkaistu: |
2004
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| Sarja: | Modification of material properties |
| Aiheet: | |
| Linkit: | http://www.lib.tpu.ru/fulltext2/c/2004/C13/045.pdf |
| Aineistotyyppi: | Elektroninen Kirjan osa |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=232094 |
MARC
| LEADER | 00000nla2a2200000 4500 | ||
|---|---|---|---|
| 001 | 232094 | ||
| 005 | 20240212143527.0 | ||
| 035 | |a (RuTPU)RU\TPU\book\253125 | ||
| 035 | |a RU\TPU\book\253119 | ||
| 090 | |a 232094 | ||
| 100 | |a 20130208d2004 k y0engy50 ba | ||
| 101 | 0 | |a eng | |
| 102 | |a RU | ||
| 105 | |a y z 100zy | ||
| 135 | |a drnn ---uucaa | ||
| 200 | 1 | |a Phenomenological Model of Dc Magnetron Discharge |f S. N. Yanin [et al.] | |
| 203 | |a Text |c electronic | ||
| 225 | 1 | |a Modification of material properties | |
| 300 | |a Title from the title-page. | ||
| 320 | |a [References: p. 335 (6 tit.)] | ||
| 330 | |a A phenomenological model of DC magnetron discharge has been created on basis of probe measurements of cathode-fall potential. Ionization rate of operating gas, plasma density depending on discharge current, coordinate distribution of ion and electron discharge current, energy distribution of accelerated argon ions on target surface had been calculated. It is shown that cathode-fall potential is characteristic of DC magnetron sputtering system and main processes caused material sputtering take place within a area several millimeters thickness near the target surface. | ||
| 333 | |a Режим доступа: из корпоративной сети ТПУ | ||
| 336 | |a Text files | ||
| 337 | |a Adobe Reader | ||
| 463 | 1 | |0 (RuTPU)RU\TPU\book\75459 |t 7 International conference on modification of materials with particle beams and plasma flows |o Tomsk, Russia, 25-29 July 2004 |f edited by S. Korovin, A. Ryabchikov |v [P. 332-335] |d 2004 |p 1 Multimedia CD-ROM | |
| 610 | 1 | |a физика | |
| 610 | 1 | |a магнетронные разряды | |
| 610 | 1 | |a феноменологические модели | |
| 610 | 1 | |a постоянный ток | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a газы | |
| 610 | 1 | |a ионизация | |
| 610 | 1 | |a ускоренные ионы | |
| 610 | 1 | |a ускоренные электроны | |
| 610 | 1 | |a магнетронное распыление | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a электронный ресурс | |
| 701 | 1 | |a Yanin |b S. N. | |
| 701 | 1 | |a Zhukov |b V. V. | |
| 701 | 1 | |a Krivobokov |b V. P. |c Russian physicist |c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc) |f 1948- |g Valery Pavlovich |3 (RuTPU)RU\TPU\pers\30416 |9 14757 | |
| 701 | 1 | |a Patsevich |b V. V. | |
| 801 | 1 | |a RU |b 63413507 |c 20120118 | |
| 801 | 2 | |a RU |b 63413507 |c 20161229 |g RCR | |
| 856 | 4 | |u http://www.lib.tpu.ru/fulltext2/c/2004/C13/045.pdf | |
| 942 | |c CF | ||