Phenomenological Model of Dc Magnetron Discharge
| Parent link: | 7 International conference on modification of materials with particle beams and plasma flows: Tomsk, Russia, 25-29 July 2004/ edited by S. Korovin, A. Ryabchikov. [P. 332-335].— , 2004 |
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| Övriga upphovsmän: | , , , |
| Sammanfattning: | Title from the title-page. A phenomenological model of DC magnetron discharge has been created on basis of probe measurements of cathode-fall potential. Ionization rate of operating gas, plasma density depending on discharge current, coordinate distribution of ion and electron discharge current, energy distribution of accelerated argon ions on target surface had been calculated. It is shown that cathode-fall potential is characteristic of DC magnetron sputtering system and main processes caused material sputtering take place within a area several millimeters thickness near the target surface. Режим доступа: из корпоративной сети ТПУ Text files |
| Publicerad: |
2004
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| Serie: | Modification of material properties |
| Ämnen: | |
| Länkar: | http://www.lib.tpu.ru/fulltext2/c/2004/C13/045.pdf |
| Materialtyp: | Elektronisk Bokavsnitt |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=232094 |
| Sammanfattning: | Title from the title-page. A phenomenological model of DC magnetron discharge has been created on basis of probe measurements of cathode-fall potential. Ionization rate of operating gas, plasma density depending on discharge current, coordinate distribution of ion and electron discharge current, energy distribution of accelerated argon ions on target surface had been calculated. It is shown that cathode-fall potential is characteristic of DC magnetron sputtering system and main processes caused material sputtering take place within a area several millimeters thickness near the target surface. Режим доступа: из корпоративной сети ТПУ Text files |
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