High-Frequency Short-Pulsed Metal Plasma-Immersion Ion Implantation Using Filtered DC Vacuum-Arc Plasma (Part I); 7 International conference on modification of materials with particle beams and plasma flows

High-Frequency Short-Pulsed Metal Plasma-Immersion Ion Implantation Using Filtered DC Vacuum-Arc Plasma (Part I); 7 International conference on modification of materials with particle beams and plasma flows

Bibliographic Details
Parent link:	7 International conference on modification of materials with particle beams and plasma flows.— 2004.— [P. 134-137]
Main Author:	Ryabchikov A. I. Aleksandr Ilyich
Other Authors:	Ryabchikov I. A., Stepanov I. B. Igor Borisovich
Summary:	References see the second part of the paper. Title from the title-page. An innovative concept in the development of advanced coating deposition and ion implantation method including an application of filtered DC metal plasma source and high-frequency short-pulsed negative bias voltage with a duty factor in the range 10÷99% are considered. The regularities of ion implantation and metal plasma deposition for metal samples are theoretically and experimentally investigated. Experimentally has been shown that metal plasma based ion implantation as well as high-concentration metal plasma ion implantation with compensation of ion surface sputtering by metal plasma deposition as well as ion-assisted coating deposition can be realized by variation of bias potential ranging from 0 V to 4 kV, pulse repetition rate smoothly adjusted in the range (2÷4.4)⋅105 pps and pulse duration ranging from 0.5 to 2 μs. Special features of the material treatment method depending on plasma concentration, pulse repetition rate and duty factor has been examined. Режим доступа: из корпоративной сети ТПУ Text files
Language:	English
Published:	2004
Series:	Fundamentals of modification processes
Subjects:	физика плазма металлы осаждение ионная имплантация металлическая плазма ионное распыление импульсы труды учёных ТПУ электронный ресурс
Online Access:	http://www.lib.tpu.ru/fulltext2/c/2004/C13/035.pdf
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=231969

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