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|a Plasmochemical reactor for regeneration of etching solutions
|f A. G. Karengin, I. A. Tikhomiriv, S. A. Sosnovsky
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|a References: 1 tit.
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|0 (RuTPU)RU\TPU\book\7822
|t Korus`98. Abstracts
|o The Second Russian-Korean International Symposium on Science and Technology, August, 30-September, 5
|f Tomsk Polytechnic University (TPU) ; Novosibirsk State Technical University
|v P. 119
|d 1998
|p 293 p.
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|a Karengin
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1 |
|a Sosnovsky
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