Mechanical Microsensors
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| Other Authors: | |
| Language: | Russian |
| Published: |
Berlin, Springer-Verlag, 2001
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| Series: | Microtechnology and MEMS |
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| Format: | Book |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=141730 |
| Physical Description: | 295 p. il. |
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| ISBN: | 3540675825 |